ToF-SIMS analysis of ultrathin films and their fragmentation patterns
Organic thin films are of great interest due to their intriguing interfacial and functional properties, especially for device applications such as thin-film transistors and sensors. As their thickness approaches single nanometer thickness, characterization and interpretation of the extracted data become increasingly complex. In this study, plasma polymerization is used to construct ultrathin films that range in thickness from 1 to 20 nm, and time-of-flight secondary ion mass spectrometry coupled with principal component analysis is used to investigate the effects of film thickness on the resulting spectra. We demonstrate that for these cross-linked plasma polymers, at these thicknesses, the observed trends are different from those obtained from thicker films with lower degrees of cross-linking: contributions from ambient carbon contamination start to dominate the mass spectrum; cluster-induced nonlinear enhancement in secondary ion yield is no longer observed; extent of fragmentation is higher due to confinement of the primary ion energy; and the size of the primary ion source also affects fragmentation (e.g., Bi versus Bi). These differences illustrate that care must be taken in choosing the correct primary ion source as well as in interpreting the data.
Evaluating hydrophobic recovery of N and HO(g) plasma modified silk fibroin films aged at ambient and elevated temperatures
Silk fibroin is a naturally derived polymer with great potential for biomedical use due to its strength, lack of immune response, and ability to biodegrade. The relatively hydrophobic nature of silk, however, can cause challenges with cell adhesion . Therefore, modification must be performed to improve the surface hydrophilicity, enhancing silk utility in the biomedical space. Low-temperature plasma (LTP) treatment is an established method for polymer modification and has the benefits of being a solvent-free, adaptable process. N and HO(g) LTP treatments are both well-documented as strategies to enhance polar functional groups on a polymer's surface. However, many polymers tend to revert to their original hydrophobic state upon aging, reversing the effects of LTP modification. The hydrophobic recovery of N and HO(g) LTP-modified silk has not been previously studied but has important implications for the uses and longevity of silk substrates in biomedical contexts. The goal of this study was to systematically evaluate the hydrophobic recovery of N and HO(g) LTP-treated silk films. Films were LTP-modified using optimized plasma parameters (applied power, pressure, treatment time) and aged under both ambient and elevated temperature conditions up to 6 weeks after the initial treatment. Silk film surface properties were evaluated immediately after treatment and throughout the aging process using both water contact angle goniometry and x-ray photoelectron spectroscopy. LTP-treated silk films demonstrated a significant decrease in hydrophobicity compared to the untreated controls. Remarkably, both N and HO(g) LTP modifications resulted in surfaces that retained hydrophilic properties over the 6 week aging period. Our findings represent a departure from what has been previously demonstrated in most LTP-modified synthetic polymers, suggesting that the secondary structure of silk fibroin plays a critical role in resisting hydrophobic recovery.
Versailles Project on Advanced Materials and Standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene
We report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collected at lower pass energies (<90 eV), values of absolute offset and systematic deviation are ∼4.9% and ±8.8%, respectively; low pass energy spectra perform worse than the global average, in terms of systematic deviations, due to diminished count rates and signal-to-noise ratio. Differences in absolute offset are attributed to the surface roughness of the LDPE induced by sample preparation. We further assess the usability of LDPE as a secondary reference material and comment on its performance in the presence of issues such as variable dark noise, x-ray warm up times, inaccuracy at low count rates, and underlying spectrometer problems. In response to participant feedback and the results of the study, we provide an updated LDPE intensity calibration protocol to address the issues highlighted in the interlaboratory study. We also comment on the lack of implementation of a consistent and traceable intensity calibration method across the community of x-ray photoelectron spectroscopy (XPS) users and, therefore, propose a route to achieving this with the assistance of instrument manufacturers, metrology laboratories, and experts leading to an international standard for XPS intensity scale calibration.
EUV-induced carbon growth at contaminant pressures between 10 mbar and 10 mbar: Experiment and model
Carbon contamination induced by ultraviolet (UV) radiation affects precision optics in applications as diverse as semiconductor lithography and satellite observations of the Sun. Our previous experiments have shown that low-intensity UV-induced surface contamination depends quasi-logarithmically on the partial pressure of the organic contaminant due to the poly-dispersive nature of the surface-adsorbate system. This complex dependence presents difficulties because, without a physically motivated model, it cannot be extrapolated to low pressures. We present measurements and a model of carbon growth induced by UV exposure in the presence of tetradecane vapor. The model, which includes a coverage-dependent adsorption energy, describes the measurements over four orders of magnitude in pressure, and we expect that it can be extrapolated to the lower pressures of interest to the extreme ultraviolet (EUV) lithography and solar astronomy communities. Our experience with other contaminants leads us to expect that other organic contaminants will behave similar to tetradecane. The results also provide insights into the kinetics governing coverage isotherms at extremely low partial pressures.
Uranium and arsenic unregulated water issues on Navajo lands
The geologic profile of the western United States lends itself to naturally elevated levels of arsenic and uranium in the groundwater and can be aggravated by mining. The Navajo Nation, located in the American Southwest, is the largest contiguous Native American Nation and has over a 100-year legacy of hard rock mining. Concentrations of uranium and arsenic above drinking water standards in unregulated water sources pose various human-health risks to the Navajo Nation due to the lack of public water infrastructure that exists. Although high natural background concentrations may occur in some environments, anthropogenic contamination concerns are especially troublesome for the Navajo Nation, where past uranium mining activity and natural sources affect unregulated water supplies. Community engaged research on uranium and arsenic present in unregulated water wells in the western portion of the Navajo Nation has been a focus of the Ingram laboratory since 2003. These studies have provided important information, particularly for uranium and arsenic, to the communities and the Navajo tribal leaders.
Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser
The unique flexible and piezoelectric properties of polyvinylidene fluoride (PVDF) films would allow for new applications for integrated bioelectronic devices. The use of these films has been precluded by the difficulty in machining them into small, discrete features without damaging the properties of the material. The etching of piezoelectric PVDF by means of a 193 nm excimer laser is explored and characterized. Etch rates are shown for common laser fluence values, along with images of the quality of the cuts to provide the reader with an understanding of the compromise between etch rate and edge roughness. The authors describe a novel method for the etching of piezoelectric, -phase PVDF. While PVDF is flexible, acoustically matched to biological tissue, and has a wide resonance bandwidth, it is often overlooked as a piezoelectric material for micro-electrical-mechanical-system devices because of the difficulty in fabrication. In this paper, the authors characterize the etch rate and quality while using a 193 nm argon fluoride excimer laser for patterning.
Spatially controlled stem cell differentiation via morphogen gradients: A comparison of static and dynamic microfluidic platforms
The ability to harness the processes by which complex tissues arise during embryonic development would improve the ability to engineer complex tissuelike constructs -a longstanding goal of tissue engineering and regenerative medicine. In embryos, uniform populations of stem cells are exposed to spatial gradients of diffusible extracellular signaling proteins, known as morphogens. Varying levels of these signaling proteins induce stem cells to differentiate into distinct cell types at different positions along the gradient, thus creating spatially patterned tissues. Here, the authors describe two straightforward and easy-to-adopt microfluidic strategies to expose human pluripotent stem cells to spatial gradients of desired differentiation-inducing extracellular signals. Both approaches afford a high degree of control over the distribution of extracellular signals, while preserving the viability of the cultured stem cells. The first microfluidic platform is commercially available and entails static culture, whereas the second microfluidic platform requires fabrication and dynamic fluid exchange. In each platform, the authors first computationally modeled the spatial distribution of differentiation-inducing extracellular signals. Then, the authors used each platform to expose human pluripotent stem cells to a gradient of these signals (in this case, inducing a cell type known as the primitive streak), resulting in a regionalized culture with differentiated primitive streak cells predominately localized on one side and undifferentiated stem cells at the other side of the device. By combining this approach with a fluorescent reporter for differentiated cells and live-cell fluorescence imaging, the authors characterized the spatial and temporal dynamics of primitive streak differentiation within the induced signaling gradients. Microfluidic approaches to create precisely controlled morphogen gradients will add to the stem cell and developmental biology toolkit, and may eventually pave the way to create increasingly spatially patterned tissuelike constructs .
Review Article: Tools and trends for probing brain neurochemistry
The brain is composed of complex neuronal networks that interact on spatial and temporal scales that span several orders of magnitude. Uncovering how this circuitry gives rise to multifaceted phenomena such as perception, memory, and behavior remains one of the grand challenges in science today. A wide range of investigative methods have been developed to delve deeper into the inner workings of the brain, spanning the realms of molecular biology, genetics, chemistry, optics, and engineering, thereby forming a nexus of discovery that has accelerated our understanding of the brain. Whereas neuronal electrical excitability is a hallmark property of neurons, chemical signaling between neurons-mediated by hundreds of neurotransmitters, neuromodulators, hormones, and other signaling molecules-is equally important, but far more elusive in its regulation of brain function for motor control, learning, and behavior. To date, the brain's neurochemical state has been interrogated using classical tools borrowed from analytical chemistry, such as liquid chromatography and amperometry, and more recently, newly developed fluorescent sensors. Here, the authors review advances in the development of functional fluorescent probes that are beginning to expand their understanding of the neurochemical basis of brain function alongside device-based analytical tools that have already made extensive contributions to the field. The emphasis herein is on the paradigms of probe and device development, which follow certain design principles unique to the interrogation of brain chemistry.
Molecular mechanisms of atomic layer etching of cobalt with sequential exposure to molecular chlorine and diketones
The mechanism of thermal dry etching of cobalt films is discussed for a thermal process utilizing sequential exposures to chlorine gas and a diketone [either 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (hexafluoroacetylacetone, hfacH) or 2,4-pentanedione (acetylacetone, acacH)]. The process can be optimized experimentally to approach atomic layer etching (ALE); a sequential exposure to Cl and hfacH dry etchants at 140 °C is shown to proceed efficiently. The use of acacH as a diketone does not result in ALE with chlorine even at 180 °C, but the decrease of surface chlorine concentration and chemical reduction of cobalt is noted. However, thermal desorption analysis suggests that the reaction of chlorinated cobalt surface exposed to the ambient conditions (oxidized) with hfacH does produce volatile Co-containing products within the desired temperature range and the products contain Co. The effect of adsorption of ligands on the energy required to remove surface cobalt atoms is evaluated using the density functional theory.
Gas-cluster ion sputtering: Effect on organic layer morphology
Analysis of the surface of thin Irganox 1010 films before and after sputtering with an argon gas-cluster ion beam was performed with AFM and XPS to determine the effect that Zalar rotation has on the chemistry and morphology of the surface. The analysis is based on the change in roughness of the surface by comparing the same location on the surface before and after sputtering. The ion beam used was an of size = 1000 and energy 4 keV. The XPS analysis agreed with previous results in which the ion beam did not cause measurable accumulation of damaged material. Based on the AFM results, the Irganox 1010 surface became rougher as a result of ion sputtering, and the degree of roughening was quantified, as was the sputter rate. Furthermore, Zalar rotation during ion sputtering did not have a significant effect on surface roughening, surprisingly.
Comparison of ZnO surface modification with gas-phase propiolic acid at high and medium vacuum conditions
Recent advances in preservation of the morphology of ZnO nanostructures during dye sensitization required the use of a two-step preparation procedure. The first step was the key for preserving ZnO materials morphology. It required exposing clean ZnO nanostructures to a gas-phase prop-2-ynoic acid (propiolic acid) in vacuum. This step resulted in the formation of a robust and stable surface-bound carboxylate with ethynyl groups available for further modification, for example, with click chemistry. This paper utilizes spectroscopic and microscopic investigations to answer several questions about this modification and to determine if the process can be performed under medium vacuum conditions instead of high vacuum procedures reported earlier. Comparing the results of the preparation process at medium vacuum of 0.5 Torr base pressure with the previously reported investigations of the same process in high vacuum of 10Torr suggests that both processes lead to the formation of the same surface species, confirming that the proposed modification scheme can be widely applicable for ZnO sensitization procedures and does not require the use of high vacuum. Additional analysis comparing the computationally predicted surface structures with the results of spectroscopic investigations yields the more complete description of the surface species resulting from this approach.
Ultrahigh vacuum dc magnetron sputter-deposition of epitaxial Pd(111)/AlO(0001) thin films
Pd(111) thin films, ∼245 nm thick, are deposited on AlO(0001) substrates at ≈0.5, where is the Pd melting point, by ultrahigh vacuum dc magnetron sputtering of Pd target in pure Ar discharges. Auger electron spectra and low-energy electron diffraction patterns acquired from the as-deposited samples reveal that the surfaces are compositionally pure 111-oriented Pd. Double-axis x-ray diffraction (XRD) ω-2θ scans show only the set of Pd 111 peaks from the film. In triple-axis high-resolution XRD, the full width at half maximum intensity Γ of the Pd 111 ω-rocking curve is 630 arc sec. XRD 111 pole figure obtained from the sample revealed six peaks 60°-apart at a tilt angles corresponding to Pd 111 reflections. XRD ϕ scans show six 60°-rotated 111 peaks of Pd at the same ϕ angles for 11[Formula: see text]3 of AlO based on which the epitaxial crystallographic relationships between the film and the substrate are determined as [Formula: see text]ǁ[Formula: see text] with two in-plane orientations of [Formula: see text]ǁ[Formula: see text] and [Formula: see text]ǁ[Formula: see text]. Using triple axis symmetric and asymmetric reciprocal space maps, interplanar spacings of out-of-plane (111) and in-plane (11[Formula: see text]) are found to be 0.2242 ± 0.0003 and 0.1591 ± 0.0003 nm, respectively. These values are 0.18% lower than 0.2246 nm for (111) and the same, within the measurement uncertainties, as 0.1588 nm for (11[Formula: see text]) calculated from the bulk Pd lattice parameter, suggesting a small out-of-plane compressive strain and an in-plane tensile strain related to the thermal strain upon cooling the sample from the deposition temperature to room temperature. High-resolution cross-sectional transmission electron microscopy coupled with energy dispersive x-ray spectra obtained from the Pd(111)/AlO(0001) samples indicate that the Pd-AlO interfaces are essentially atomically abrupt and dislocation-free. These results demonstrate the growth of epitaxial Pd thin films with (111) out-of-plane orientation with low mosaicity on AlO(0001).
Vacuum Furnace for Degassing Stainless-Steel Vacuum Components
Ultra-high vacuum systems must often be constructed of materials with ultra-low outgassing rates to achieve pressure of 10 Pa and below. Any component placed into the ultra-high vacuum system must also be constructed of materials with ultra-low outgassing rates. Baking stainless steel vacuum components to a temperature range of 400 °C to 450 °C while under vacuum is an effective method to reduce the outgassing rate of vacuum components for use in ultra-high vacuum systems. The design, construction, and operation of a vacuum furnace capable of baking vacuum components to a temperature of 450° C while maintaining a pressure of 10 Pa or lower is described. The furnace has been used for extended bakes at 450 °C while maintaining pressures below 10 Pa. As an example, we obtained an outgassing rate of 1.2 × 10 Pa L s for a gate valve baked for 20 days at a temperature of 420 °C.
Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers
The authors investigated the outgassing rates and fluxes of vacuum chambers constructed from common 304L stainless steel vacuum components and subjected to heat treatments. Our goal was to obtain H outgassing flux on the order of 10 Pa l scm or better from standard stainless steel vacuum components readily available from a variety of manufacturers. The authors found that a medium-temperature bake in the range of 400 to 450°C, performed with the interior of the chamber under vacuum, was sufficient to produce the desired outgassing flux. The authors also found that identical vacuum components baked in air at the same temperature for the same amount of time did not produce the same low outgassing flux. In that case, the H outgassing flux was lower than that of a stainless-steel chamber with no heat treatment, but was still approximately 1 order of magnitude higher than that of the medium-temperature vacuum-bake. Additionally, the authors took the chamber that was subjected to the medium-temperature vacuum heat treatment and performed a 24-h air bake at 430°C. This additional heat treatment lowered the outgassing rate by nearly a factor of two, which strongly suggests that the air-bake created an oxide layer which reduced the hydrogen recombination rate on the surface. [http://dx.doi.org/10.1116/1.4983211].
Recommended practice for calibrating vacuum gauges of the ionization type
This article represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.
infrared spectroscopy during LaO ALD using La( PrCp) and HO
Infrared spectra of surface species have been obtained during atomic layer deposition using tris(isopropylcyclopentadienyl)lanthanum, La(PrCp), and water as precursors at 160 °C and 350 °C. Gas-phase spectra of La(PrCp)are obtained for comparison. At low temperature, ligand exchange is seen to occur, and carbonate formation is found. With extended purging, the organic ligands are found to be stable on the surface, and carbonates are not formed. These observations indicate that carbonate formation is occurring during exposure to the precursors. At high temperature, the La precursor is observed to decompose leaving an opaque deposit containing relatively little hydrogen.
MoS thin films from a (N Bu)(NMe)Mo and 1-propanethiol atomic layer deposition process
Potential commercial applications for transition metal dichalcogenide (TMD) semiconductors such as MoS rely on unique material properties that are only accessible at monolayer to few-layer thickness regimes. Therefore, production methods that lend themselves to scalable and controllable formation of TMD films on surfaces are desirable for high volume manufacturing of devices based on these materials. We have developed a new thermal atomic layer deposition (ALD) process using bis(-butylimido)-bis(dimethylamido)molybdenum and 1-propanethiol to produce MoS-containing amorphous films. We observe self-limiting reaction behavior with respect to both the Mo and S precursors at a substrate temperature of 350 °C. Film thickness scales linearly with precursor cycling, with growth per cycle values of 0.1 nm/cycle. As-deposited films are smooth and contain nitrogen and carbon impurities attributed to poor ligand elimination from the Mo source. Upon high-temperature annealing, a large portion of the impurities are removed, and we obtain few-layer crystalline 2H-MoS films.
Quantum-based vacuum metrology at NIST
The measurement science in realizing and disseminating the unit for pressure in the International System of Units (SI), the pascal (Pa), has been the subject of much interest at NIST. Modern optical-based techniques for pascal metrology have been investigated, including multi-photon ionization and cavity ringdown spectroscopy. Work is ongoing to recast the pascal in terms of quantum properties and fundamental constants and in so doing, make vacuum metrology consistent with the global trend toward quantum-based metrology. NIST has ongoing projects that interrogate the index of refraction of a gas using an optical cavity for low vacuum, and count background particles in high vacuum to extreme high vacuum using trapped laser-cooled atoms.
Characterization of bubbler performance for low-volatility liquid precursor delivery
The performance of a bubbler to deliver the low-volatility, liquid cobalt precurso - -(Bu-acetylene) dicobalthexacarbonyl (CCTBA) for reduced-pressure chemical vapor deposition and atomic layer deposition processes was characterized. A relatively large process window was investigated by varying carrier gas flow rate, system pressure, and bubbler temperature. For this range of conditions, the CCTBA partial pressure was measured using a custom-designed non-dispersive infrared gas analyzer, and the CCTBA flow rates were derived from these partial pressure measurements. The dependence of CCTBA flow rate on these process parameters was modeled to obtain a deeper understanding of the factors influencing bubbler performance. Good agreement between measured and modeled CCTBA flow rates was obtained using a model in which a constant CCTBA partial pressure in the bubbler head space for a given bubbler temperature was assumed and in which the pressure drop between the bubbler head space and the pressure measurement location was included. The dependence of CCTBA head space partial pressure on temperature was parameterized in the form of the August equation, which is commonly used to describe the temperature-dependence of vapor pressure. While this report was focused specifically on CCTBA, the results are expected to apply to other low-volatility, liquid precursors of interest in vapor deposition processes.
Practical Guides for X-Ray Photoelectron Spectroscopy (XPS): First Steps in planning, conducting and reporting XPS measurements
Over the past three decades, the widespread utility and applicability of X-ray photoelectron spectroscopy (XPS) in research and applications has made it the most popular and widely used method of surface analysis. Associated with this increased use has been an increase in the number of new or inexperienced users which has led to erroneous uses and misapplications of the method. This article is the first in a series of guides assembled by a committee of experienced XPS practitioners that are intended to assist inexperienced users by providing information about good practices in the use of XPS. This first guide outlines steps appropriate for determining whether XPS is capable of obtaining the desired information, identifies issues relevant to planning, conducting and reporting an XPS measurement, and identifies sources of practical information for conducting XPS measurements. Many of the topics and questions addressed in this article also apply to other surface-analysis techniques.
Measured relationship between thermodynamic pressure and refractivity for six candidate gases in laser barometry
Laser refractometers are approaching accuracy levels where gas pressures in the range 1 Pa < < 1 MPa inferred by measurements of gas refractivity at a known temperature will be competitive with the best existing pressure standards and sensors. Here, the authors develop the relationship between pressure and refractivity , via measurement at 293.1529(13) K and = 632.9908(2) nm for ≤ 500 kPa. The authors give values of the coefficients , , for six gases: Ne, Ar, Xe, N, CO, and NO. For each gas, the resulting molar polarizability has a standard uncertainty within 16 × 10· . In these experiments, pressure was realized via measurements of helium refractivity at a known temperature: for He, the relationship between pressure and refractivity is known through calculation much more accurately than it can presently be measured. This feature allowed them to calibrate a pressure transducer with helium and subsequently use the transducer to accurately gage the relationship between pressure and refractivity on an isotherm for other gases of interest.